USING ATOMIC LAYER DEPOSITION (ALD) IN NANO-ELECTRONIC DEVICES, SENSORS AND SYSTEMS

被引：0
|
作者：
Reader, Alec
机构：
[1] Nanotechnology Knowledge Transfer Network (NanoKTN), United States
来源：
ELECTRONICS WORLD | 2009年 / 115卷 / 1878期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：10 / +
页数：2
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