High Speed Focus Control Capability of Electrostatic-Pneumatic MEMS Deformable Mirrors

被引：1
|
作者：
Moghimi, Mohammad J. [1 ]
Chattergoon, Krishna N. [1 ]
Dickensheets, David L. [1 ]
机构：
[1] Montana State Univ, Dept Elect & Comp Engn, Bozeman, MT 59717 USA
来源：
MOEMS AND MINIATURIZED SYSTEMS XIII | 2014年 / 8977卷
关键词：
MEMS deformable mirror; Electrostatic-pneumatic actuation; High speed focus control; Air damping;
D O I：
10.1117/12.2042195
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100 mu s.
引用
收藏
页数：9
相关论文
共 50 条
  • [21] Dynamic behavior of high speed, silicon nitride deformable mirrors
    Himmer, P
    Dickensheets, D
    MOEMS DISPLAY AND IMAGING SYSTEMS II, 2004, 5348 : 150 - 159
  • [22] Dynamic behavior of high speed, silicon nitride deformable mirrors
    Himmer, P
    Dickensheets, D
    MOEMS AND MINIATURIZED SYSTEMS IV, 2004, 5346 : 224 - 233
  • [23] Structure modulated electrostatic deformable mirror for focus and geometry control
    Nam, Saekwang
    Park, Suntak
    Yun, Sungryul
    Park, Bongje
    Park, Seung Koo
    Kyung, Ki-Uk
    OPTICS EXPRESS, 2016, 24 (01): : 55 - 66
  • [24] Modeling, parameter estimation, and open-loop control of MEMS deformable mirrors
    Vogel, Curtis R.
    Tyler, Glenn A.
    Lu, Yang
    MEMS ADAPTIVE OPTICS IV, 2010, 7595
  • [25] Simple iterative method for open-loop control of MEMS deformable mirrors
    Blain, Celia
    Guyon, Olivier
    Conan, Rodolphe
    Bradley, Colin
    ADAPTIVE OPTICS SYSTEMS, PTS 1-3, 2008, 7015
  • [26] Through-Wafer Interconnects for High Degree of Freedom MEMS Deformable Mirrors
    Diouf, Alioune
    Bifano, Thomas G.
    Stewart, Jason B.
    Cornelissen, Steven
    Bierden, Paul
    MEMS ADAPTIVE OPTICS IV, 2010, 7595
  • [27] MEMS Deformable Mirrors for Space-Based High-Contrast Imaging
    Morgan, Rachel E.
    Douglas, Ewan S.
    Allan, Gregory W.
    Bierden, Paul
    Chakrabarti, Supriya
    Cook, Timothy
    Egan, Mark
    Furesz, Gabor
    Gubner, Jennifer N.
    Groff, Tyler D.
    Haughwout, Christian A.
    Holden, Bobby G.
    Mendillo, Christopher B.
    Ouellet, Mireille
    Pereira, Paula do Vale
    Stein, Abigail J.
    Thibault, Simon
    Wu, Xingtao
    Xin, Yeyuan
    Cahoy, Kerri L.
    MICROMACHINES, 2019, 10 (06)
  • [28] Deformable MEMS grating for wide tunability and high operating speed
    Tormen, Maurizio
    Peter, Yves-Alain
    Niedermann, Philippe
    Hoogerwerf, Arno
    Shea, Herbert
    Stanley, Ross
    MOEMS DISPLAY, IMAGING, AND MINIATURIZED MICROSYSTEMS IV, 2006, 6114
  • [29] Deformable MEMS grating for wide tunability and high operating speed
    Tormen, Maurizio
    Peter, Yves-Alain
    Niedermann, Philippe
    Hoogerwerf, Arno
    Stanley, Ross
    JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2006, 8 (07): : S337 - S340
  • [30] Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control
    Di Barba, Paolo
    Fattorusso, Luisa
    Versaci, Mario
    COMMUNICATIONS IN APPLIED AND INDUSTRIAL MATHEMATICS, 2020, 11 (01) : 35 - 54
12345