Analysis of alternative capacitor topologies for MEMS switches fabricated with printed circuit technology

被引：0
|
作者：
Deken, BJ [1 ]
机构：
[1] Univ Missouri, Rolla, MO 65401 USA
来源：
2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS | 2004年
关键词：
D O I：
10.1109/ICMENS.2004.1509005
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
New architectures to reduce the actuation voltage of a cantilever beam MEMS switch are presented. Voltage reduction is achieved through manipulation of the shape of the capacitor plates to increase the effective area and decrease the effective distance between plates. Improvements are achieved without a physical increase in footprint dimensions, beam to substrate separation, or a decrease in the spring constant of the beam. The architectures are particularly applicable to applications that require a small footprint, high degrees of electrical isolation, and low switching times.
引用
收藏
页码：522 / 526
页数：5
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