Influence of laser and isothermal treatments on microstructural properties of SnO2 films

被引：20
|
作者：
Rembeza, ES
Richard, O
Van Landuyt, J
机构：
[1] Voronezh State Univ, Dept Solid State Phys, Voronezh 394693, Russia
[2] Univ Antwerp, RUCA, Dept Phys, EMAT, B-2020 Antwerp, Belgium
来源：
MATERIALS RESEARCH BULLETIN | 1999年 / 34卷 / 10-11期
关键词：
thin films; electron microscopy; X-ray diffraction; microstructure;
D O I：
10.1016/S0025-5408(99)00188-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
SnO2 thin films doped with Sb (ca. 3%) were deposited on glass and silicon substrates by magnetron sputtering and heat-treated by laser or isothermal treatment. The films were characterized for their composition, morphology, and crystalline structure by X-ray diffraction (XRD) and transmission electron microscopy (TEM). It was found that the tin oxide films consisted only of the SnO2 tetragonal phase; they were well crystallized and no microstructural defects were observed. The average grain size of the laser-treated films was approximately 6.3-8.9 nm, which is 2 times smaller than the grain size of the isothermally treated films. (C) 2000 Elsevier Science Ltd.
引用
收藏
页码：1527 / 1533
页数：7
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