CHAOS IN ELECTROSTATICALLY ACTUATED RF-MEMS MEASURED AND MODELED

被引：1
|
作者：
Stulemeijer, J. [1 ]
Herfst, R. W. [1 ]
Bielen, J. A. [1 ]
机构：
[1] Epcos SAW, Nijmegen, Netherlands
来源：
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
关键词：
D O I：
10.1109/MEMSYS.2009.4805534
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Observation of period doubling bifurcations and chaos in electrostatically actuated RF-MEMS are reported in this paper for the first time. Period doubling, quadrupling and chaotic motion can clearly be observed in the measurement data. A 1D nonlinear device model is fitted to the capacitance versus voltage (C-V) curves and mechanical resonance curve data. The features of the observed bifurcation diagram have been reproduced with the 1D model.
引用
收藏
页码：920 / 922
页数：3
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