Modelling of X-ray diffraction from multilayered structure with a various gradient of composition on boundaries of layers

With numerical modelling of diffraction curves from multilayered superlattice structure, a good correlation of experimental and modelled satellite peaks' intensities is revealed by taking into account a gradient of concentration on interface between the layers. This fact allows obtaining information about the layer-layer interface on the basis of the analysis of a simple rocking curve instead of using procedures, which are more difficult. Am optimal functional dependence of this gradient is determined, and the change of effective thickness of layers depending on the form of a structure gradient is noted. Introduction of various forms of composition gradient on a interface of layers does not influence on the definition of a structure period, however, it has a small influence on the determination of thickness ratio for GaAs and In0.2Ga0.6As layers. Opportunities of unequivocal determination of the form of a structure gradient on the layer-layer interface by analysing the experimental rocking curves from symmetric and asymmetric reflections are reported.