Capabilities of combined studies of DLC films by X-ray methods

We demonstrate the possibility of determining a large group of physical properties of DLC films using only one group of methods based on X-ray interference studies. These include methods the determination of the film thickness, material density and roughness of the surface. We present the analysis of possibilities to use the method of the two-crystal X-ray spectrometer to evaluate internal stress and to deduce the modules of elasticity and thermal expansion coefficients of the film. It is shown that this method can be used for the in-situ control of the film parameters during the film deposition in the technological chamber. (C) 1997 Elsevier Science S.A.