Finite element based electrostatic-structural coupled analysis with automated mesh morphing

被引：0
|
作者：
Zhulin, VI [1 ]
Owen, SJ [1 ]
Ostergaard, DF [1 ]
机构：
[1] ANSYS Inc, Canonsburg, PA 15317 USA
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.
引用
收藏
页码：501 / 504
页数：4
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