On-chip magnetoresistive detection of resonance in microcantilevers

被引：16

作者：

Patil, S. B. ^{[1
,2
]}

Guedes, A. ^{[1
,2
,3
]}

Freitas, P. P. ^{[1
,2
,3
]}

Cardoso, S. ^{[1
,2
,3
]}

Chu, V. ^{[1
,2
]}

Conde, J. P. ^{[1
,2
,4
]}

机构：

[1] INESC Microsistemas & Nanotecnol, P-1000029 Lisbon, Portugal

[2] IN Inst Nanosci & Nanotechnol, P-1000029 Lisbon, Portugal

[3] Univ Tecn Lisboa, Dept Phys, Inst Super Tecn, P-1049001 Lisbon, Portugal

[4] Univ Tecn Lisboa, Dept Biol & Chem Engn, Inst Super Tecn, P-1049001 Lisbon, Portugal

来源：

APPLIED PHYSICS LETTERS | 2009年 / 95卷 / 02期

关键词：

amorphous semiconductors; cantilevers; chromium alloys; cobalt alloys; elemental semiconductors; magnetic sensors; magnetic thin films; magnetoresistance; micromechanical devices; permanent magnets; platinum alloys; silicon; spin valves; SENSORS; SILICON; DEVICES;

D O I：

10.1063/1.3174912

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Magnetoresistive spin-valve sensors were used to provide on-chip detection of the mechanical resonance of a thin silicon microelectromechanical systems cantilever. The spin-valve sensor was placed underneath the free end of the cantilever. A CoCrPt thin-film permanent magnet was placed on top of the amorphous silicon/Al cantilever. The cantilever was electrostatically actuated and its deflection creates a change in the magnetic field that can be sensed by the spin-valve sensor. The resonance frequency of the structure in the megahertz range is detected by the measurement of the spin-valve sensor output. Minimum deflection detection limit is determined to be 0.06 A degrees/Hz(1/2).

引用

页数：3

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