Deposition of potassium lithium niobate films by sol-gel method

被引：0

作者：

Zhang, HX ^{[1
]}

Zhou, Y ^{[1
]}

Kam, CH ^{[1
]}

Han, XQ ^{[1
]}

Cheng, SD ^{[1
]}

Ooi, BS ^{[1
]}

Lam, YL ^{[1
]}

Chan, YC ^{[1
]}

Sun, Z ^{[1
]}

Yu, MB ^{[1
]}

Shi, X ^{[1
]}

Yoon, SF ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Microelect Div, Photon Res Grp, Singapore 639798, Singapore

来源：

DESIGN, FABRICATION AND CHARACTERIZATION OF PHOTONIC DEVICES | 1999年 / 3896卷

关键词：

potassium lithium niobate; sol-gel; XRD; Raman scattering; absorption edge; optical waveguiding;

D O I：

10.1117/12.370342

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Potassium lithium niobate (KLN) films have been prepared by sol-gel method using metal ethoxides as starting materials. The films were deposited by spin coating and were annealed in air in a conventional oven as well as in a rapid thermal processor (RTP). X-ray diffraction and Raman scattering measurements have shown that polycrystalline KLN films with tetragonal tungsten-bronze-type structure could be obtained on both SiO2 buffered Si and fused quartz substrates. Surface morphology studies Indicated that RTP annealing could avoid film cracking and enable nanostructured low-surface roughness KLN films to be formed. Optical waveguiding experiments showed that the films have refractive indices close to those of their single crystal and could support several modes. The films deposited on fused quartz were highly transparent in the visible-near infrared spectral range and the absorption edges of the films, as determined from the absorption data, were found to shift towards the violet spectral side.

引用

页码：425 / 432

页数：4

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