SOICMOS compatible low-power microheater optimization for the fabrication of smart gas sensors

被引：53

作者：

Laconte, J ^{[1
]}

Dupont, U ^{[1
]}

Flandre, D ^{[1
]}

Raskin, JP ^{[1
]}

机构：

[1] Catholic Univ Louvain, Microelect Lab, Microwave Lab, Res Ctr Micro & Nanoscop Elect Dev & Mat, B-1348 Louvain, Belgium

来源：

IEEE SENSORS JOURNAL | 2004年 / 4卷 / 05期

关键词：

bulk micromachining; CMOS-; compatibility; gas sensor; microheater; silicon-on-insulator;

D O I：

10.1109/JSEN.2004.833516

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, an original design of a polysilicon loop-shaped microheater on a 1-mum thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400 degreesC). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micro-machining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology.

引用

页码：670 / 680

页数：11

共 50 条

[31] A new generation of IC processing:: Low-power, high-performance SOICMOS
Pelloie, JL
Auberton-Hervé, A
SOLID STATE TECHNOLOGY, 2001, 44 (11) : 63 - +
[32] A high-speed, low-power SOICMOS circuit with variable threshold voltages
Higuchi, H
Ikeda, T
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 2001, 84 (05): : 20 - 28
[33] Low-Power Wearable Healthcare Sensors
Sherratt, Robert Simon
Dey, Nilanjan
ELECTRONICS, 2020, 9 (06)
[34] Low Power IoT Network Sensors Optimization for Smart Cities Applications
Fialho, Vitor
Fortes, Fernando
2019 2ND INTERNATIONAL CONFERENCE ON SMART ENERGY SYSTEMS AND TECHNOLOGIES (SEST 2019), 2019,
[35] Design, Simulation, and Performance Evaluation of a High Temperature and Low Power Consumption Microheater Structure for MOS Gas Sensors
Das, Kaushik
Kakoty, Priyanka
ADVANCES IN COMMUNICATION AND COMPUTING, 2015, 347 : 221 - 229
[36] An ultra Low-Power MR*1) Sensor for a smart water meter or a smart gas meter
Zhang, Z.
Tsuchiya, Y.
Akiyama, O.
Konno, H.
MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS II, 2013, 543 : 418 - 421
[37] Low-Power Smart Industrial Control
Bilgic, Attila
Pichot, Vincent
Gerding, Michael
Bruns, Felix
2011 DESIGN, AUTOMATION & TEST IN EUROPE (DATE), 2011, : 595 - 599
[38] Investigating the effect of deposition variation on the performance sensitivity of low-power gas sensors
Sadek, K
Moussa, W
SENSORS AND ACTUATORS B-CHEMICAL, 2005, 107 (02) : 497 - 508
[39] Zinc oxide nanowires deposited on polymeric hotplates for low-power gas sensors
Zappa, D.
Briand, D.
Comini, E.
Courbat, J.
de Rooij, N. F.
Sberveglieri, G.
26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 1137 - 1140
[40] Towards low-power electronics: self-recovering and flexible gas sensors
Falco, A.
Rivadeneyra, A.
Loghin, F. C.
Salmeron, J. F.
Lugli, P.
Abdelhalim, A.
JOURNAL OF MATERIALS CHEMISTRY A, 2018, 6 (16) : 7107 - 7113

← 1 2 3 4 5 →