An accurate calculation of spreading resistance

被引：63
|
作者：
Denhoff, M. W. [1 ]
机构：
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2006年 / 39卷 / 09期
关键词：
D O I：
10.1088/0022-3727/39/9/009
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The spreading resistance of a round ohmic contact was calculated by solving the Laplace equation using, analytical, numerical and finite element methods. From this, formulae were found to calculate accurate values (better than 0.1%) of the spreading resistance over the entire range of contact size to substrate thickness ratio.
引用
收藏
页码：1761 / 1765
页数：5
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