An accurate calculation of spreading resistance

被引:63
|
作者
Denhoff, M. W. [1 ]
机构
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
关键词
D O I
10.1088/0022-3727/39/9/009
中图分类号
O59 [应用物理学];
学科分类号
摘要
The spreading resistance of a round ohmic contact was calculated by solving the Laplace equation using, analytical, numerical and finite element methods. From this, formulae were found to calculate accurate values (better than 0.1%) of the spreading resistance over the entire range of contact size to substrate thickness ratio.
引用
收藏
页码:1761 / 1765
页数:5
相关论文
共 50 条