Electronic and vibrational properties of hydrogenated amorphous silicon nitride

被引:0
|
作者
Lin, SY [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 300, Taiwan
来源
关键词
amorphous hydrogenated amorphous silicon nitride; electronic properties; vibrational properties;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The theoretical model calculations are used to study the electronic and vibrational properties of hydrogenated amorphous silicon nitride. The electronic densities of states of Si3N4 Bethe lattice, Si dangling bond (DB), SiH, SiH2, N DB, N-N DB, NH and NH2 bonds are calculated. The charges are found to transfer from Si to 14 in the Si-N bond, Si to H in the Si-H bond and H to N in the N-H bond. Si DB, N DB and N-N DB are found to have defect states in the energy gap. These defect states can be identified by the electron spin resonance. The N site of the Si2NH2 complex can be positively charged and form a defect pair with the negatively charged Si DB. The vibrational densities of states of Si3N4 Bethe lattice, SiH, SiH2, NH, and NH2 bonds are calculated. The vibrational dinsities of state of the SiD, SiD2, ND and ND2 bonds are also calculated as an aid to identify the local modes. The Si-H bond stretching frequency higher than 2160 cm(-1) is due to the asymmetric stretching mode of the SiH2 bond and the N-H stretching mode of 3450 cm(-1) is due to the asymmetric stretching mode of the NH2 bond. The asymmetric stretching modes of the SiH2 and NH2 bonds seem to be more infrared sensitive than their symmetric stretching modes.
引用
收藏
页码:543 / 552
页数:10
相关论文
共 50 条
  • [41] VIBRATIONAL STRUCTURE OF HYDROGENATED AMORPHOUS-SILICON CARBIDE ALLOYS
    GHOSH, BK
    AGRAWAL, BK
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1988, 147 (01): : 97 - 102
  • [42] A REASSESSMENT OF THE VIBRATIONAL-SPECTRUM OF HYDROGENATED AMORPHOUS-SILICON
    JOHN, P
    ODEH, IM
    THOMAS, MJK
    SOLID STATE COMMUNICATIONS, 1982, 41 (04) : 341 - 344
  • [43] VIBRATIONAL SPECTROSCOPY OF HYDROGENATED EVAPORATED AMORPHOUS-SILICON FILMS
    KNIFFLER, N
    SCHRODER, B
    GEIGER, J
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 58 (2-3) : 153 - 163
  • [44] ACTIVATED REACTIVE EVAPORATION OF HYDROGENATED AMORPHOUS-SILICON NITRIDE
    SHUFFLEBOTHAM, PK
    WHITE, JF
    CARD, HC
    KAO, KC
    APPLIED PHYSICS LETTERS, 1986, 49 (11) : 651 - 653
  • [45] Photoluminescence analyses of hydrogenated amorphous silicon nitride thin films
    Anutgan, Mustafa
    Anutgan, Tamila
    Atilgan, Ismail
    Katircioglu, Bayram
    JOURNAL OF LUMINESCENCE, 2011, 131 (07) : 1305 - 1311
  • [46] Hydrogenated amorphous silicon nitride deposited by DC magnetron sputtering
    Mokeddem, K.
    Aoucher, M.
    Smail, T.
    SUPERLATTICES AND MICROSTRUCTURES, 2006, 40 (4-6) : 598 - 602
  • [47] Photoluminescence of Er-doped hydrogenated amorphous silicon nitride
    Zhao, Q
    Yan, H
    Kumeda, A
    Shimizu, T
    APPLIED SURFACE SCIENCE, 2004, 227 (1-4) : 306 - 311
  • [48] Enhancement and inhibition of photoluminescence in hydrogenated amorphous Silicon nitride microcavities
    Serpenguzel, Ali
    Aydinli, Atilla
    Bek, Alpan
    OPTICS EXPRESS, 1997, 1 (05): : 108 - 113
  • [49] Alteration of spontaneous emission in hydrogenated amorphous silicon nitride microcavities
    Serpenguzel, A
    Aydinli, A
    Bek, A
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 227 : 1142 - 1145
  • [50] Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride
    Khumaini, Khabib
    Kim, Yewon
    Hidayat, Romel
    Chowdhury, Tanzia
    Kim, Hye-Lee
    Cho, Byungchul
    Park, Sangjoon
    Lee, Won-Jun
    APPLIED SURFACE SCIENCE, 2024, 654