共 50 条
- [21] Micro-actuators for high density disk drives PROCEEDINGS OF THE 1997 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 1997, : 3979 - 3984
- [22] Power delivery and locomotion of untethered micro-actuators MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 2003, : 124 - 129
- [24] Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film 2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2021, : 1545 - 1549
- [25] Simulation and experiment investigation on structural design and reinforcement of pyrotechnical sliding micro-actuators Analog Integrated Circuits and Signal Processing, 2016, 88 : 431 - 441
- [26] Possibility of using carbon nanotubes as micro-actuators SMART STRUCTURES AND MATERIALS 2004: SMART ELECTRONICS, MEMS, BIOMEMS AND NANOTECHNOLOGY, 2004, 5389 : 159 - 166
- [27] The effects of proton irradiation on electrothermal micro-actuators CANADIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING-REVUE CANADIENNE DE GENIE ELECTRIQUE ET INFORMATIQUE, 2002, 27 (01): : 3 - 5
- [28] A new basic technology for magnetic micro-actuators MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 143 - 147
- [29] Scale effects and thermal considerations for micro-actuators 1998 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-4, 1998, : 1516 - 1521
- [30] Force measurements of polysilicon thermal micro-actuators MICROMACHINED DEVICES AND COMPONENTS II, 1996, 2882 : 296 - 306