Micromachined rotating gyroscope with electromagnetically levitated rotor

被引：6
|
作者：
Wu, X-S. [1 ]
Chen, W-Y. [1 ]
Zhao, X. -L. [1 ]
Zhang, W-P. [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China
来源：
ELECTRONICS LETTERS | 2006年 / 42卷 / 16期
关键词：
5;
D O I：
10.1049/el:20061479
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A type of micromachined rotating gyroscope with an electromagnetically levitated rotor is proposed. The working mechanism and the fabrication method based on MEMS technology of micromachined gyroscopes are described. The experiment showed that the vacuum package can increase the rotating speed of the rotor (diameter, 2.2 mm; thickness, 20 mu m) from 800 to 4000 rpm. Possible reasons that resist further increase of rotating speed are air slip damping and electromagnetic damping. Sensing precision of Y/s was obtained in the experiment.
引用
收藏
页码：912 / 913
页数：2
相关论文
共 50 条
  • [31] Surface oscillations of an electromagnetically levitated droplet
    Berry, SR
    Hyers, RW
    Racz, LM
    Abedian, B
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2005, 26 (05) : 1565 - 1581
  • [32] Surface Oscillations of an Electromagnetically Levitated Droplet
    S. R. Berry
    R. W. Hyers
    L. M. Racz
    B. Abedian
    International Journal of Thermophysics, 2005, 26 : 1565 - 1581
  • [33] Nonlinear analysis of an electromagnetically levitated droplet
    Ciocirlan, BO
    Marghitu, DB
    MATHEMATICAL AND COMPUTER MODELLING OF DYNAMICAL SYSTEMS, 2000, 6 (03) : 251 - 265
  • [34] Stability analysis of an electromagnetically levitated sphere
    Priede, Janis
    Gerbeth, Gunter
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (05)
  • [35] Design and analysis of a micromachined gyroscope
    Zarei, Nilgoon
    Leung, Albert
    Jones, John D.
    MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS X, 2012, 8251
  • [36] Vibration measurements of micromachined gyroscope
    Seimitsu Kogaku Kaishi, 3 (345-348):
  • [37] Vacuum packaged micromachined gyroscope
    Qiu, Anping
    Su, Yan
    Shi, Qin
    Yang, Bo
    Xu, Yishen
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 407 - 409
  • [38] Novel silicon micromachined gyroscope
    Xiong, Bin
    Wang, Yuelin
    Huang, Xiaozhen
    Wang, Weiyuan
    Gaojishu Tongxin/High Technology Letters, 2002, 12 (09):
  • [39] Design and simulation of micromachined gyroscope
    AbuAlarraj, N.
    Hassan, H.
    Ibrahim, H.
    COMPUTATIONAL CHEMISTRY AND APPLICATIONS IN ELECTRONICS, 2007, : 132 - 136
  • [40] Design and Simulation of Micromachined Gyroscope
    AbuAlarraj, N.
    Hassan, H.
    Ibrahim, H.
    PROCEEDINGS OF THE 8TH WSEAS INTERNATIONAL CONFERENCE ON APPLIED INFORMATICS AND COMMUNICATIONS, PTS I AND II: NEW ASPECTS OF APPLIED INFORMATICS AND COMMUNICATIONS, 2008, : 261 - +
12345