Micromachined rotating gyroscope with electromagnetically levitated rotor

被引：6
|
作者：
Wu, X-S. [1 ]
Chen, W-Y. [1 ]
Zhao, X. -L. [1 ]
Zhang, W-P. [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Shanghai 200030, Peoples R China
来源：
ELECTRONICS LETTERS | 2006年 / 42卷 / 16期
关键词：
5;
D O I：
10.1049/el:20061479
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A type of micromachined rotating gyroscope with an electromagnetically levitated rotor is proposed. The working mechanism and the fabrication method based on MEMS technology of micromachined gyroscopes are described. The experiment showed that the vacuum package can increase the rotating speed of the rotor (diameter, 2.2 mm; thickness, 20 mu m) from 800 to 4000 rpm. Possible reasons that resist further increase of rotating speed are air slip damping and electromagnetic damping. Sensing precision of Y/s was obtained in the experiment.
引用
收藏
页码：912 / 913
页数：2
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