Long Range, High accuracy Absolute Distance Measurement by Improved Three-Wavelength Heterodyne Interferometry

被引:0
|
作者
Huang, Pei-Chi [1 ]
Yang, Shang-Da [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.
引用
收藏
页数:2
相关论文
共 50 条
  • [41] Absolute distance measurement using frequency-comb-referenced four-wavelength interferometry
    Wang, Guochao
    Jang, Yoon-Soo
    Kang, Hyunjay
    Chun, Byung Jae
    Kim, Young-Jin
    Kim, Seung-Woo
    NINTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2015, 9446
  • [42] Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry-application to absolute long gauge block measurement
    Decker, JE
    Miles, JR
    Madej, AA
    Siemsen, RF
    Siemsen, KJ
    de Bonth, S
    Bustraan, K
    Temple, S
    Pekelsky, JR
    APPLIED OPTICS, 2003, 42 (28) : 5670 - 5678
  • [43] High-dynamical-range angular measurement based on Heterodyne Phase Shifting Interferometry
    Liao, Fang-Jie
    Wu, Kai-Hang
    Liu, Su-Ming
    Zhang, Jing-Yi
    Ming, Min
    Liu, Qi
    Duan, Hui-Zong
    Yeh, Hsien-Chi
    OPTICS COMMUNICATIONS, 2024, 555
  • [44] High-precision absolute distance and vibration measurement with frequency scanned interferometry
    Yang, HJ
    Deibel, J
    Nyberg, S
    Riles, K
    APPLIED OPTICS, 2005, 44 (19) : 3937 - 3944
  • [45] Adaptive delay lines for absolute distance measurements in high-speed long-range frequency scanning interferometry
    Pallikarakis, Christos A.
    Huntley, Jonathan M.
    Ruiz, Pablo D.
    OSA CONTINUUM, 2021, 4 (02) : 428 - 436
  • [46] Absolute distance measurement using wavelength-multiplexed phase-locked laser diode interferometry
    Suzuki, T
    Sasaki, O
    Maruyama, T
    OPTICAL ENGINEERING, 1996, 35 (02) : 492 - 497
  • [47] ABSOLUTE DISTANCE MEASUREMENT BY WAVELENGTH SHIFT INTERFEROMETRY WITH A LASER DIODE - SOME SYSTEMATIC-ERROR SOURCES
    KIKUTA, H
    IWATA, K
    NAGATA, R
    APPLIED OPTICS, 1987, 26 (09): : 1654 - 1660
  • [48] Synthetic-wavelength-based dual-comb interferometry for fast and precise absolute distance measurement
    Zhu, Zebin
    Xu, Guangyao
    Ni, Kai
    Zhou, Qian
    Wu, Guanhao
    OPTICS EXPRESS, 2018, 26 (05): : 5747 - 5757
  • [49] Long-range, high-precision absolute distance measurement based on two optoelectronic oscillators
    Wang, Ju
    Yu, Jinlong
    Miao, Wang
    Sun, Bin
    Jia, Shi
    Wang, Wenrui
    Wu, Qiong
    OPTICS LETTERS, 2014, 39 (15) : 4412 - 4415
  • [50] Absolute distance measurement by multi-heterodyne interferometry using a frequency comb and a cavity-stabilized tunable laser
    Wu, Hanzhong
    Zhang, Fumin
    Liu, Tingyang
    Balling, Petr
    Qu, Xinghua
    APPLIED OPTICS, 2016, 55 (15) : 4210 - 4218