New insight on TDDB area scaling methodology of non-Poisson systems

被引：0

作者：

Shen, Tian ^{[1
]}

Yeap, Kong Boon ^{[1
]}

Ogden, Sean ^{[1
]}

Christiansen, Cathryn ^{[1
]}

Justison, Patrick ^{[1
]}

机构：

[1] GLOBALFOUNDRIES, Qual & Reliabil Assurance, 400 Stone Break Rd Extens, Malta, NY 12020 USA

来源：

2018 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS) | 2018年

关键词：

back-end-of-line; middle-of-line; low-kappa dielectrics; reliability statistics; area scaling; Poisson system; time-dependent dielectric breakdown;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Non-Poisson area scaling behavior has long been observed in BEOL (Back End Of Line) and MOL (Middle Of Line) Time-dependent dielectric breakdown (TDDB) reliability tests due to known variations across the wafer. Three different statistical models have been proposed to accurately account for this non Poisson behavior. In this work, a new methodology for proper area scaling treatment is systematically studied by both experiments and Monte Carlo simulations. A more realistic and robust method is then proposed, for a more accurate reliability projection.

引用

页数：6

共 24 条

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