Effect of laser fluence on the growth of Mo films prepared by a pulsed laser deposition method

被引：0
|
作者：
Lei, Jiehong [1 ]
机构：
[1] West China Normal Univ, Phys & Elect Informat Inst, Nanchong 637002, Peoples R China
来源：
APPLIED MATERIALS AND TECHNOLOGIES FOR MODERN MANUFACTURING, PTS 1-4 | 2013年 / 423-426卷
关键词：
metals; thin films; laser deposition; atomic force microscopy; X-ray diffraction; surface properties; SOFT; ENERGY;
D O I：
10.4028/www.scientific.net/AMM.423-426.780
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Molybdenum films with flat and smooth surfaces were prepared on Si (100) substrates using a pulsed laser deposition method, results indicate that increased laser fluence results in narrower diffraction peak, higher surface roughness, and transition from amorphous state into polycrystalline state with gradually increased grain size. The growth mechanism of the films and the effects of particle energy on the growth of the films are discussed based on an analysis of the changes in the crystallization process with laser fluence.
引用
收藏
页码：780 / 783
页数：4
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