Advantages of MEMS and Its Distinct New Applications

被引：8
|
作者：
Chen, Ying Jian [1 ]
机构：
[1] Inst Sci & Tech Informat China, Res Ctr Strateg Sci & Technol Issues, Beijing 100038, Peoples R China
来源：
METALLURGY TECHNOLOGY AND MATERIALS II | 2013年 / 813卷
关键词：
MEMS; IC; sensor; biomedical; optical; automotive; application;
D O I：
10.4028/www.scientific.net/AMR.813.205
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, we first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and IC, then some latest research progresses on biomedical, optical and automotive applications of MEMS are briefly reviewed. Finally, possible future developments of MEMS are prospected.
引用
收藏
页码：205 / 209
页数：5
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