A Novel Trench Shielded MOSFET with Buried Field Ring for Tunable Switching and Improved Ruggedness

被引:0
|
作者
Guan, Lingpeng [1 ]
Bobde, Madhur [1 ]
Padmanabhan, Karthik [1 ]
Yilmaz, Hamza [1 ]
Bhalla, Anup [2 ]
Zhang, Lei [1 ]
Chiu, Allan [1 ]
Kim, Jongoh [1 ]
Li, Wenjun [1 ]
机构
[1] Alpha & Omega Semicond, 475 Oakmead Pkwy, Sunnyvale, CA 94085 USA
[2] United Silicon Carbide, Monmouth Jct, NJ 08852 USA
关键词
Superjunction; MOSFET; Trench; UIS; High Voltage; Efficiency;
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
In this paper, a novel trench shielded 600V MOSFET with buried field ring is proposed and demonstrated. The proposed structure achieves an active area die shrink of 35-55% compared to a conventional 600V planar MOSFET. Furthermore, it almost doubles the Unclamped Inductive Switching (UIS) rated current and improves 0.3% of the efficiency compared to the Superjunction device. It also shows better diode reverse recovery performance than Superjunction device.
引用
收藏
页码:401 / 404
页数:4
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