MEMS Tunable Capacitor With Wide Tuning Range Using Multiple Voltage Sources

被引：0

作者：

Lavy, Omer ^{[1
]}

Gal, Lior ^{[1
]}

Weicherman, Danny ^{[1
]}

Stolyarova, Sara ^{[1
]}

David, Eyal ^{[1
]}

Saad, Avraam ^{[1
]}

Nemirovsky, Yael ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel

来源：

IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, COMMUNICATIONS, ANTENNAS AND ELECTRONICS SYSTEMS (COMCAS 2009) | 2009年

关键词：

MEMS; pull in; varactor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical model for the proposed structure, and a full analytic solution to the attached pull in problem. Our varactor has capacitance ratio of 2.43:1.

引用

页数：5

共 50 条

[31] Electrically-Pumped 1050-nm MEMs Tunable VCSELs Wide tuning Range for OCT Applications
Ellafi, Dalila
Yang, Michael
Kim, Sam
Bandyopadhyay, Neelanjan
Chase, Chris
2018 IEEE INTERNATIONAL SEMICONDUCTOR LASER CONFERENCE (ISLC), 2018, : 99 - 100
[32] HIGH TUNING RANGE AND LOW PULL-IN VOLTAGE MEMS TUNABLE CAPACITORS FILLED WITH LIQUID CRYSTAL MATERIALS
Lin, Chia-Wei
Chen, Yi-Jie
Lee, Chien-Wen
Shih, Wen-Pin
Chang, Pei-Zen
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, : 216 - 219
[33] Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators
Behzad Sotoudeh
Saeid Afrang
Salar Ghasemi
Omid Reza Afrang
Microsystem Technologies, 2023, 29 : 1039 - 1051
[34] Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators
Sotoudeh, Behzad
Afrang, Saeid
Ghasemi, Salar
Afrang, Omid Reza
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2023, 29 (07): : 1039 - 1051
[35] A high Q, large tuning range, tunable capacitor for RF applications
Borwick, RL
Stupar, PA
DeNatale, J
Anderson, R
Tsai, CL
Garrett, K
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, : 669 - 672
[36] A Wide Tuning Range Voltage Controlled Ring Oscillator Using Injection Locking
Dhakad, Narendra Singh
Gurjar, R. C.
2017 INTERNATIONAL CONFERENCE ON RECENT INNOVATIONS IN SIGNAL PROCESSING AND EMBEDDED SYSTEMS (RISE), 2017, : 418 - 421
[37] MEMS tunable dual-wavelength laser with large tuning range
Cai, H.
Zhang, X. M.
Wu, J.
Tang, D. Y.
Zhang, Q. X.
Liu, A. Q.
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
[38] MEMS resonator with wide frequency tuning range and linear response to control voltages for use in voltage control oscillators
Kawakami, Kouki
Kaneuchi, Shunya
Tanigawa, Hiroshi
Suzuki, Kenichiro
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 29 (12)
[39] Development of a wide-tuning-range two-parallel-plate tunable capacitor for integrated wireless communication systems
Zou, J
Liu, C
Schutt-Ainé, JE
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2001, 11 (05) : 322 - 329
[40] A high Q, large tuning range MEMS capacitor for RF filter systems
Borwick, RL
Stupar, PA
DeNatale, J
Anderson, R
Tsai, C
Garrett, K
Erlandson, R
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 103 (1-2) : 33 - 41

← 1 2 3 4 5 →