MEMS Tunable Capacitor With Wide Tuning Range Using Multiple Voltage Sources

被引：0

作者：

Lavy, Omer ^{[1
]}

Gal, Lior ^{[1
]}

Weicherman, Danny ^{[1
]}

Stolyarova, Sara ^{[1
]}

David, Eyal ^{[1
]}

Saad, Avraam ^{[1
]}

Nemirovsky, Yael ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel

来源：

IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, COMMUNICATIONS, ANTENNAS AND ELECTRONICS SYSTEMS (COMCAS 2009) | 2009年

关键词：

MEMS; pull in; varactor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical model for the proposed structure, and a full analytic solution to the attached pull in problem. Our varactor has capacitance ratio of 2.43:1.

引用

页数：5

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