Lateral-coupling coplanar-gate oxide-based thin-film transistors on bare paper substrates

被引:8
|
作者
Wu, Guodong [1 ,2 ]
Wan, Xiang [2 ]
Yang, Yi [1 ]
Jiang, Shuanghe [1 ]
机构
[1] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
lateral capacitive coupling; coplanar gate; thin-film transistors; AND logic gates; bare paper substrates; PROTON; ELECTRONICS;
D O I
10.1088/0022-3727/47/49/495101
中图分类号
O59 [应用物理学];
学科分类号
摘要
For conventional thin-film transistors (TFTs), bottom-gate or top-gate configuration is always adopted because the channel current is generally controlled by vertical capacitive coupling. In this article, depending on huge lateral electric-double-layer (EDL) capacitor induced by spatial movement of protons in phosphosilicate glass (PSG) solid electrolyte dielectrics, coplanar-gate indium-zinc-oxide (IZO)-TFTs based on the lateral capacitive coupling were fabricated on bare paper substrates. The PSG solid electrolyte films here were used at the same time as gate dielectrics and smooth buffer layers. These TFTs showed a low-voltage operation of only 1 V with a large field-effect mobility of 13.4 cm(2) V-1.s, a high current on/off ratio of 6 x 10(6) and a small subthreshold swing of 75 mV/decade. Furthermore, with introducing another coplanar gate, AND logic operation was also demonstrated on the coplanar dual-gate TFTs. These simple lateral-coupling coplanar-gate IZO-TFTs on bare paper substrates are very promising for low-cost portable sensors and bio-electronics.
引用
收藏
页数:6
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