Properties of an atmospheric pressure radio-frequency argon and nitrogen plasma

被引：142
|
作者：
Moravej, M. [1 ]
Yang, X.
Barankin, M.
Penelon, J.
Babayan, S. E.
Hicks, R. F.
机构：
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
[2] Surfx Technol LLC, Culver City, CA 90232 USA
来源：
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2006年 / 15卷 / 02期
关键词：
D O I：
10.1088/0963-0252/15/2/005
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
An atmospheric pressure capacitive discharge source has been developed that operates at power densities over 100 W cm(-3). The ground state nitrogen atom concentration was measured at the exit of the source by titration with NO, and it was found to reach a maximum of 3.0 +/- 0.8 x 10(17) cm(-3) at 6.0 vol% N-2 in argon, 250 degrees C and 150 W cm(-3). This is equivalent to 2.3 vol% of N atoms in the afterglow. At these conditions, the electron density and temperature are estimated to be 3.1 x 10(12) cm(-3) and 1.2 eV. A plug-flow model of the plasma and afterglow was developed, and it was determined that the maximum N atom concentration achievable is limited by three body recombination.
引用
收藏
页码：204 / 210
页数：7
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