Synthesis, characterization, and thermal properties of cobalt(II) compounds with guanidinate ligands

被引:9
|
作者
Zhang, Yuxiang [1 ]
Du, Liyong [1 ]
Liu, Xinfang [2 ]
Ding, Yuqiang [1 ]
机构
[1] Jiangnan Univ, Int Joint Res Ctr Photorespons Mol & Mat, Sch Chem & Mat Engn, 1800 Lihu Rd, Wuxi 214122, Peoples R China
[2] Luoyang Normal Univ, Coll Chem & Chem Engn, Henan Key Lab Funct Oriented Porous Mat, Luoyang 471934, Peoples R China
基金
中国国家自然科学基金;
关键词
ATOMIC LAYER DEPOSITION; CHEMICAL-VAPOR-DEPOSITION; ALD CO(W) FILMS; THIN-FILMS; CU-INTERCONNECTS; METAL-FILMS; COMPLEXES; CO; CVD; PRECURSORS;
D O I
10.1039/c8nj01232f
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Two cobalt(ii) guanidinate compounds of the general type [((R)(2)NC((PrN)-Pr-i)(2))(2)Co] (R = Me, SiMe3) were synthesized and characterized by elemental analysis, H-1 NMR, and single crystal X-ray diffraction. The compounds were easily synthesized using a conventional salt-elimination reaction of CoCl2 with the corresponding lithium salt of guanidinate ligands in a general procedure. The thermal properties of the compounds including their volatility, vapour pressure, and thermal stability were studied by thermogravimetric analysis (TGA). The results indicated that both compounds volatilized in a single step with residual mass remaining (13.2% and 10.5%). Moreover, the compounds that were potentially CVD precursors were investigated through deposition experiments conducted in a hot-wall CVD reactor. A film was successfully deposited through CVD, which indicated that the compounds were capable of being precursors for the CVD of cobalt-based films.
引用
收藏
页码:9110 / 9115
页数:6
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