Etching behavior of CdTe and ZnxCd1-xTe single crystals in aqueous H2O2-HBr-lactic acid solutions

被引：2
|
作者：
Tomashik, Z. F. [1 ]
Tomashik, V. N. [1 ]
Gnativ, I. I. [1 ]
Stratiichuk, I. B. [1 ]
机构：
[1] Natl Acad Sci Ukraine, Lashkarev Inst Semicond Phys, UA-03028 Kiev, Ukraine
来源：
INORGANIC MATERIALS | 2006年 / 42卷 / 08期
关键词：
Dissolution Rate; Cadmium Telluride; Composition Region; Hydrobromic Acid; Composition Diagram;
D O I：
10.1134/S0020168506080103
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have studied the etching behavior of single crystals of CdTe and ZnxCd1-xTe solid solutions in aqueous H2O2-HBr-lactic acid bromine-releasing solutions and the mechanism of the dissolution process. The results have been used to construct dissolution rate-composition diagrams (contours of constant dissolution rate) and locate the composition region of solutions suitable for the dynamic chemical polishing of these semiconductor materials.
引用
收藏
页码：859 / 862
页数：4
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