Device modeling of amorphous oxide semiconductor TFTs

被引:9
|
作者
Abe, Katsumi [1 ]
Ota, Kazuki [1 ]
Kuwagaki, Takeshi [1 ]
机构
[1] Silvaco Japan Co Ltd, Yokohama, Kanagawa 2208136, Japan
关键词
THIN-FILM TRANSISTORS; ELECTRONIC-STRUCTURE; CARRIER TRANSPORT; SUBGAP STATES; HIGH-MOBILITY; DEGRADATION; CONDUCTION; HYDROGEN; VOLTAGE;
D O I
10.7567/1347-4065/ab21a5
中图分类号
O59 [应用物理学];
学科分类号
摘要
Device models of amorphous oxide semiconductor thin-film transistors (AOS TFTs) associate AOS carrier transport and electronic states with AOS TFT electrical characteristics. Thus, such models are very useful for estimation and analysis on operations and reliability of AOS TFTs and developments of electronic devices with AOS TFTs. We discuss the models including mobility models and density of subgap state (DOS) models, which reflect the carrier-electron transport and the electronic states of AOSs. A device simulator employing a carrier-electron density dependent mobility model and an appropriate DOS model can reproduce temperature and electrical characteristics of AOS TFTs. (C) 2019 The Japan Society of Applied Physics
引用
收藏
页数:9
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