Large-scale ordered carbon nanotube arrays initiated from highly ordered catalyst arrays on silicon substrates

被引：35
|
作者：
Lei, Y
Yeong, KS
Thong, JTL
Chim, WK
机构：
[1] Natl Univ Singapore, Singapore MIT Alliance, Singapore 117576, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
来源：
CHEMISTRY OF MATERIALS | 2004年 / 16卷 / 14期
关键词：
D O I：
10.1021/cm049588p
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Large-scale fabrication of ordered arrays of carbon nanotubes (CNTs) on silicon substrate has been accomplished using a technique that combines the advantages of the electron-beam lithography (EBL) and template methods. The monodisperse diameters of the fabricated CNTs can be adjusted from about 5 to 100 nm. Using the proposed method, ordered arrays of highly graphitized CNTs can be fabricated economically on most flat and smooth substrates.
引用
收藏
页码：2757 / 2761
页数：5
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