Synchrotron-based investigation of iron precipitation in multicrystalline silicon

被引：11

作者：

Seifert, W. ^{[1
,2
]}

Vyvenko, O. ^{[2
,3
]}

Arguirov, T. ^{[1
,2
]}

Kittler, M. ^{[1
,2
]}

Salome, M. ^{[4
]}

Seibt, M. ^{[5
]}

Trushin, M. ^{[2
]}

机构：

[1] IHP Microelect, D-15236 Frankfurt, Oder, Germany

[2] IHP BTU Joint Lab, D-03046 Cottbus, Germany

[3] St Petersburg State Univ, VA Fok Inst Phys, St Petersburg 108594, Russia

[4] European Synchrotron Radiat Facil, F-38043 Grenoble, France

[5] Univ Gottingen, Inst Phys 4, D-37077 Gottingen, Germany

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2009年 / 45卷 / 4-5期

关键词：

Silicon; Defects; Metal precipitates; Recombination; Synchrotron X-ray microprobe techniques; SOLAR-CELLS; CZOCHRALSKI SILICON; DIFFUSION LENGTH; METAL-CLUSTERS;

D O I：

10.1016/j.spmi.2008.11.025

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report on investigations of the precipitation of iron in block-cast multicrystalline silicon using the techniques of X-ray beam induced current, X-ray fluorescence microscopy and X-ray absorption microspectroscopy. The samples studied were intentionally contaminated with iron and annealed at temperatures between 850 and 1050 degrees C. Annealing at 950 degrees C was found to lead to well detectable iron precipitation inside the grains and at grain boundaries. Small only iron clusters were detected after the 850 degrees C anneal while no iron clusters were found after the 1050 degrees C treatment. X-ray absorption near edge structure analyses of the iron clusters revealed mostly iron silicide and in one case iron oxide. Under the given condition at the beamline, the detection sensitivity for iron was estimated to be 4 x 10(7) atoms, corresponding to a spherical FeSi(2) particle of 40 nm radius. (c) 2008 Elsevier Ltd. All rights reserved.

引用

页码：168 / 176

页数：9

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