A Comprehensive Analysis of the 2-DEG Transport Properties in InxAl1-xN/AlN/GaN Heterostructure: Experiments and Numerical Simulations

A comprehensive investigation on the low-field 2-DEG mobility in InxAl1-xN/AlN/GaN heterostructure has been made through Hall experimental and numerical calculation based on an ensemble Monte Carlo (MC) approach. Hall measurement on a lattice-matched (LM) In0.18Al0.82N/AlN/GaN heterostructure grown by metal-organic chemical vapor deposition (MOCVD) has been carried out as a function of temperature ranging from 77 to 405 K. A more rigorous model is presented taking both inter-and intra-subband scattering into account. The scattering rates are derived from the results of the electron density, the quantized energy levels, and the corresponding wave functions based on the self-consistent solutions of Poisson's and Schrodinger's equation given in our previous work. We confirm that the interface scattering process dominates the mobility within the low temperature (77-130 K), as increasing of the temperature, the highly inelastic scattering caused by partial occupation of the higher subband is responsible for the rapid degradation of the 2-DEG mobility. The role of surface morphology and indium fraction of the heterostructure on the dependence of the 2-DEG mobility have been clarified qualitatively in detail. The calculated results are widely compared with the published literature and our experimental finding. A reasonable agreement is achieved.