Separation of bulk lifetime and surface recombination velocity obtained by transverse optical probing and multi-wavelength technique

被引:6
|
作者
Sirleto, L
Irace, A
Vitale, GF
Zeni, L
Cutolo, A
机构
[1] CNR, IRECE, I-80124 Naples, Italy
[2] Univ Naples Federico II, Dept Elect & Telecommun Engn, I-80125 Naples, Italy
[3] Univ Naples 2, Dept Informat Engn, I-80131 Naples, Italy
[4] Univ Sannio, I-82100 Benevento, Italy
关键词
bulk lifetime; surface recombination velocity; optical techniques; process control;
D O I
10.1016/S0143-8166(01)00175-0
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this paper, a contactless, all-optical and non-destructive technique for simultaneous measurement of minority carrier recombination lifetime and Surface recombination velocity is presented. The principle is based upon measurement, at low injection level, of the free carrier optical absorption transient probed by an infrared beam following electron-hole pairs excitation by a pulsed laser beam working at several wavelengths. Being contactless and nondestructive with respect to the surface to be analyzed, the method is appealing for routine lifetime characterization. A brief review of the theory underlying the measurement technique, aimed to emphasize its advantages and limits, and preliminary experimental data proving the applicability of the new scheme are presented. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:461 / 472
页数:12
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