Array of dielectric nanocomposite devices using photoepoxy Su-8 as the polymeric phase

An array of dielectric nanocomposite devices in which negative tone photoepoxy Su-8 is used as the polymeric matrix and Ba0.5Sr0.5TO3 nanoparticles as the inclusions is fabricated on silicon substrate. The use of Su-8 necessitates a single step process for both the top electrode deposition and ultraviolet exposure using a shadow mask and direct-current magnetron sputtering in the device fabrication. Scanning electron microscopy examination indicates a uniform distribution of nanoparticles in Su-8 matrix. Effective dielectric constant of the nanocomposites increases with loading concentration with a good agreement with the Maxwell-Garnett and Bruggeman approximations at low concentrations, while dielectric loss is low for all compositions. (c) 2006 American Institute of Physics.