SU-8 nanocomposite coatings with improved tribological performance for MEMS

The increasing interests in micro-electro-mechanical systems (MEMS) has raised the requirement for photoresist materials with improved friction and wear properties for mechanically loaded 3D shaped microstructures. In this work, SU8 photoresist layers reinforced with different amounts of silica nanoparticles were produced and thermally treated. Dry sliding tests indicate that SU8 composite epoxies produced in the form of thin films exhibit similar or even better tribological properties than bulk epoxies. The SU8 nanocomposites exhibit reduced wear rates and frictional coefficient compared to the un-reinforced material. Further, nanoparticle content, heat treatment and nature of the sliding counter piece were found to affect wear and friction. The tribological behaviour was discussed in terms of mechanical properties and contact pressures. (c) 2006 Elsevier B.V. All rights reserved.