Design and fabrication of surface-micromachined spherical mirrors

被引：0
|
作者：
Hou, MTK [1 ]
Liao, KM [1 ]
Yeh, HZ [1 ]
Hong, PY [1 ]
Chen, RS [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 300, Taiwan
来源：
2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.
引用
收藏
页码：195 / 196
页数：2
相关论文
共 50 条
  • [21] A fully surface-micromachined piezoelectric accelerometer
    DeVoe, DL
    Pisano, AP
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1205 - 1208
  • [22] A Surface-Micromachined Levitating MEMS Speaker
    Verreault, Antoine
    Cicek, Paul-Vahe
    Robichaud, Alexandre
    2022 20TH IEEE INTERREGIONAL NEWCAS CONFERENCE (NEWCAS), 2022, : 134 - 138
  • [23] A surface-micromachined shear stress imager
    Jiang, FK
    Tai, YC
    Gupta, B
    Goodman, R
    NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 110 - 115
  • [24] Modelling surface-micromachined electrothermal actuators
    Johnstone, RW
    Parameswaran, M
    CANADIAN JOURNAL OF ELECTRICAL AND COMPUTER ENGINEERING-REVUE CANADIENNE DE GENIE ELECTRIQUE ET INFORMATIQUE, 2004, 29 (03): : 193 - 202
  • [25] A surface-micromachined vertical scanning micromirror
    Lee, Ki Bang
    Lin, Liwei
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (07) : 1394 - 1401
  • [26] A surface-micromachined tunable vibratory gyroscope
    Oh, Y
    Lee, B
    Baek, S
    Kim, H
    Kim, J
    Kang, S
    Song, C
    MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 272 - 277
  • [27] Characterization techniques for surface-micromachined devices
    Eaton, WP
    Smith, NF
    Irwin, L
    Tanner, DM
    MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 431 - 438
  • [28] Analysis of a surface-micromachined peristaltic pump
    Lin, Q
    Yang, BZ
    Xie, J
    Tai, YC
    MICRO TOTAL ANALYSIS SYSTEMS 2004, VOL 1, 2005, (296): : 611 - 613
  • [29] Failure analysis of surface-micromachined microengines
    Peterson, KA
    Tangyunyong, P
    Pimentel, AA
    MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 : 190 - 200
  • [30] Characterization techniques for surface-micromachined devices
    Eaton, WP
    Smith, NF
    Irwin, L
    Tanner, DM
    MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 171 - 178
12345