An innovative Pirani pressure sensor

被引：0
|
作者：
Chou, BCS
Shie, JS
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
Pirani vacuum sensor; high pressure measurement; shallow gap;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A conventional Pirani vacuum sensor is converted into a device able to measure high gas pressure. By referring to infinite pressure, heat-loss change from the reference to a measured pressure induces electrical signal on the resistive sensor. 0.3 mu m shallow gap is formed for the floating microsensors to increase its sensitivity. This results ire a measurable range from 10(5) down to 10(-1) Torr. The thermal microsensor differs from the piezoresistive or capacitive type in sensing mechanisms. It also has advantages in smaller size and simpler structure.
引用
收藏
页码：1465 / 1468
页数：4
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