The analysis of the self-oscillation system for resonant pressure sensor

被引：4
|
作者：
Sun, Xiaodong [1 ]
Yuan, Weizheng [1 ]
Qiao, Dayong [1 ]
Ren, Sen [1 ]
机构：
[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, Xian 710072, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 04期
关键词：
Sensor Chip; Automatic Gain Control; Interface Circuit; Capacitive Pressure Sensor; Short Setting Time;
D O I：
10.1007/s00542-016-2818-2
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.
引用
收藏
页码：945 / 951
页数：7
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