Two-photon photopolymerization of functional micro-devices

被引:9
|
作者
Kawata, S [1 ]
Sun, HB [1 ]
机构
[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 5650871, Japan
关键词
two-photon photopolymerization; three-dimensional micro-nano fabrication; optical MEMS; femtosecond laser;
D O I
10.2494/photopolymer.15.471
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The current trend in two-photon laser micro-nano fabrication is device functionalization. In this paper, we report two kinds of functional devices, i.e., optically active microstructures produced by dye-doping photopolymerization and mechanically workable micro-oscillators driven by the laser trapping force. These works would open the door to two-photon production of various practical three-dimensional polymer optoelectronic/photonic devices and microelectromechanical system (MEMS).
引用
收藏
页码:471 / 474
页数:4
相关论文
共 50 条
  • [31] Preparation of a novel ferrofluidic photoresist for two-photon photopolymerization technique
    Tian, Ye
    Lu, Dongxiao
    Jiang, Haobo
    Lin, Xiaomei
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2012, 324 (20) : 3291 - 3294
  • [32] Ultrafast holographic recording using two-photon induced photopolymerization
    Kirkpatrick, SM
    Denny, LR
    Stone, MO
    DIFFRACTIVE/HOLOGRAPHIC TECHNOLOGIES AND SPATIAL LIGHT MODULATORS VII, 2000, 3951 : 102 - 107
  • [33] Self-grown fiber fabrication by two-photon photopolymerization
    Hidai, Hirofumi
    Hwang, David J.
    Grigoropoulos, Costas P.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 93 (02): : 443 - 445
  • [34] Direct Laser Writing of Submicrometric Voxels in Two-Photon Photopolymerization
    Bougdid, Yahya
    El Idrissi, Youssef
    Maouli, Imad
    Sekkat, Zouheir
    MOLECULAR AND NANO MACHINES II, 2019, 11098
  • [35] Development of glucose sensor using two-photon adsorbed photopolymerization
    Kim, Jong Min
    Park, Jung-Jin
    Lee, Haeng-Ja
    Kim, Woo-Sik
    Muramatsu, Hiroshi
    Chang, Sang-Mok
    BIOPROCESS AND BIOSYSTEMS ENGINEERING, 2010, 33 (01) : 47 - 53
  • [36] Two-photon photopolymerization using novel asymmetric ketocoumarin derivatives
    Li, Xue
    Zhao, Yuxia
    Wu, He
    Shi, Mengquan
    Wu, Feipeng
    JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 2007, 190 (01) : 22 - 28
  • [37] Modeling and optimization of acoustofluidic micro-devices
    Hahn, Philipp
    Schwab, Olivier
    Dual, Jurg
    LAB ON A CHIP, 2014, 14 (20) : 3937 - 3948
  • [38] Bioanalytical silicon micro-devices for DNA
    Simion, Monica
    Kleps, Irina
    Ignat, Teodora
    Condac, Eduard
    Craciunoiu, Florea
    Angelescu, Anca
    Miu, Mihaela
    Bragaru, Adina
    Costache, Marieta
    Savu, Lorand
    CAS 2005: INTERNATIONAL SEMICONDUCTOR CONFERENCE, 2005, 1-2 : 235 - 238
  • [39] Deformation analysis in microstructures and micro-devices
    Liu, Zhanwei
    Xie, Huimin
    Fang, Daining
    Gu, Changzhi
    Meng, Yonggang
    Wang, Weining
    Fang, Yan
    Miao, Jianmin
    MICROELECTRONICS RELIABILITY, 2007, 47 (12) : 2226 - 2230
  • [40] Dammann gratings as integratable micro-optical elements created by laser micronanofabrication via two-photon photopolymerization
    Chen, Qi-Dai
    Lin, Xiao-Feng
    Niu, Li-Gang
    Wu, Don
    Wang, Wen-Quan
    Sun, Hong-Bo
    OPTICS LETTERS, 2008, 33 (21) : 2559 - 2561