The effect of Si on the growth mode of GaN

被引:0
|
作者
von Pezold, J. [1 ]
Oliver, R. A. [1 ]
Kappers, M. J. [1 ]
Bristowe, P. D. [1 ]
Humphreys, C. J. [1 ]
机构
[1] Univ Cambridge, Dept Mat Sci & Met, Pembroke St, Cambridge CB2 3QZ, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1002/pssc.200565307
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the growth of InGaN on a SiH4-exposed GaN surface, a change in the growth mode is observed for low SiH4 doses. To help explain this observation the potential energy surface of Ga and N adatoms on a GaN (0001) surface containing an isolated Si atom in the terminating layer was calculated using plane wave density functional theory. The surface Si atom decreases the diffusion barrier of Ga and N adatoms relative to the corresponding diffusion barriers on the ideal GaN (0001) surface. In addition, the adatorn binding energies were not significantly affected by the Si surface atom. It was therefore concluded that the observed transition in growth mode of GaN cannot be simply explained by the presence of isolated Si atoms on the GaN surface. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1570 / 1574
页数:5
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