The effect of Si on the growth mode of GaN

被引:0
|
作者
von Pezold, J. [1 ]
Oliver, R. A. [1 ]
Kappers, M. J. [1 ]
Bristowe, P. D. [1 ]
Humphreys, C. J. [1 ]
机构
[1] Univ Cambridge, Dept Mat Sci & Met, Pembroke St, Cambridge CB2 3QZ, England
基金
英国工程与自然科学研究理事会;
关键词
D O I
10.1002/pssc.200565307
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the growth of InGaN on a SiH4-exposed GaN surface, a change in the growth mode is observed for low SiH4 doses. To help explain this observation the potential energy surface of Ga and N adatoms on a GaN (0001) surface containing an isolated Si atom in the terminating layer was calculated using plane wave density functional theory. The surface Si atom decreases the diffusion barrier of Ga and N adatoms relative to the corresponding diffusion barriers on the ideal GaN (0001) surface. In addition, the adatorn binding energies were not significantly affected by the Si surface atom. It was therefore concluded that the observed transition in growth mode of GaN cannot be simply explained by the presence of isolated Si atoms on the GaN surface. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:1570 / 1574
页数:5
相关论文
共 50 条
  • [1] Effect of pressure on the semipolar GaN(10-11) growth mode on patterned Si substrates
    刘建明
    张洁
    林文禹
    叶孟欣
    冯向旭
    张东炎
    Steve Ding
    徐宸科
    刘宝林
    Chinese Physics B, 2015, (05) : 576 - 580
  • [2] Effect of pressure on the semipolar GaN (10-11) growth mode on patterned Si substrates
    Liu Jian-Ming
    Zhang Jie
    Lin Wen-Yu
    Ye Meng-Xin
    Feng Xiang-Xu
    Zhang Dong-Yan
    Ding, Steve
    Xu Chen-Ke
    Liu Bao-Lin
    CHINESE PHYSICS B, 2015, 24 (05)
  • [3] Effect of InN Interlayer in Growth of GaN on Si Substrates
    Kim, Ki-Won
    Kim, Dong-Seok
    Lee, Jung-Hee
    Lee, Jae-Hoon
    Hahn, Cheol-Koo
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2010, 13 (03) : H66 - H69
  • [4] Effect of buffer layer on the growth of GaN on Si substrate
    Lee, JW
    Jung, SH
    Shin, HY
    Lee, IH
    Yang, CW
    Lee, SH
    Yoo, JB
    JOURNAL OF CRYSTAL GROWTH, 2002, 237 (1-4 II) : 1094 - 1098
  • [5] Effect of metal buffer layers on the growth of GaN on Si substrates
    Lee, Jun Hyeong
    Yu, Yeon Su
    Ahn, Hyung Soo
    Yu, Young Moon
    Yang, Min
    JOURNAL OF THE KOREAN CRYSTAL GROWTH AND CRYSTAL TECHNOLOGY, 2013, 23 (04): : 161 - 166
  • [6] MOCVD growth of ZrN thin films on GaN/Si templates and the effect of substrate temperature on growth mode, stress state, and electrical properties
    Chen, Qingqing
    Yang, Shaoyan
    Li, Chengming
    Yao, Weizhen
    Liu, Xianglin
    Niu, Huidan
    Yang, Rui
    Li, Huijie
    Wei, Hongyuan
    Wang, Lianshan
    Wang, Zhanguo
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (40)
  • [7] Si-diffused GaN for enhancernent-mode GaN MOSFET on Si applications
    Jang, S
    Ren, F
    Pearton, SJ
    Gila, BP
    Hlad, M
    Abernathy, CR
    Yang, H
    Pan, CJ
    Chyi, JI
    Bove, P
    Lahreche, H
    Thuret, J
    JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (04) : 685 - 690
  • [8] Si-diffused GaN for enhancement-mode GaN mosfet on si applications
    Soohwan Jang
    F. Ren
    S. J. Pearton
    B. P. Gila
    M. Hlad
    C. R. Abernathy
    Hyucksoo Yang
    C. J. Pan
    Jenn-Inn Chyi
    P. Bove
    H. Lahreche
    J. Thuret
    Journal of Electronic Materials, 2006, 35 : 685 - 690
  • [9] Selective-area growth of doped GaN nanorods by pulsed-mode MOCVD: Effect of Si and Mg dopants
    Bae, Si-Young
    Lekhal, Kaddour
    Lee, Ho-Jun
    Min, Jung-Wook
    Lee, Dong-Seon
    Honda, Yoshio
    Amano, Hiroshi
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2017, 254 (08):
  • [10] MBE growth of GaN films in presence of surfactants: The effect of Mg and Si
    Mula, G
    Daudin, B
    Adelmann, C
    Peyla, P
    MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 2000, 5 : art. no. - W3.35