In-situ ellipsometric study of the growth of Au thin films

被引：0
|
作者：
Shibuya, T [1 ]
Amano, N [1 ]
Kawabata, S [1 ]
Yokota, H [1 ]
机构：
[1] TOKAI UNIV,FAC ENGN,DEPT ELECTRO PHOTO OPT,HIRATSUKA,KANAGAWA 25912,JAPAN
来源：
INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY | 1996年 / 2873卷
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D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：168 / 171
页数：4
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