Capacitive micromachined ultrasonic transducers with asymmetric membranes for microfluidic applications

被引：0
|
作者：
McLean, J [1 ]
Degertekin, FL [1 ]
机构：
[1] Georgia Inst Technol, Sch Mech Engn, Atlanta, GA 30332 USA
来源：
2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2001年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A 2-D finite element model for cMUT arrays is developed. The model is verified by comparing the results to experimental data obtained on 1-D cMUT arrays. The model accurately predicts the phenomenon involved in cross-talk in cMUT arrays, namely Lamb and Stoneley waves. Using normal mode theory in conjunction with finite element analysis, the acoustic power coupled to the Stoneley waves is found to be significant and its use for fluidic sensing and actuation is proposed. The effect of cMUT geometry on the efficiency and mode selectivity of Stoneley wave generation is also studied and the results are presented.
引用
收藏
页码：925 / 928
页数：4
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