Standardization of methods for extracting statistics from surface profile measurements

被引:4
|
作者
Takacs, Peter Z. [1 ]
机构
[1] Brookhaven Natl Lab, Dept Energy, Off Basic Energy Sci, Instrumentat Div 535B, Upton, NY 11973 USA
来源
INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VIII | 2014年 / 9173卷
关键词
Profilometry; surface texture; PSD; standards; detrending; statistics;
D O I
10.1117/12.2063113
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Surface profilers and optical interferometers produce 2D maps of surface and wavefront topography. Traditional standards and methods for characterizing the properties of these surfaces use coordinate space representations of the surface topography. The computing power available today in modest personal computers makes it easy to transform into frequency space and apply well-known signal processing techniques to analyze the data. The Power Spectral Density (PSD) function of the surface height distribution is a powerful tool to assess the quality and characteristics of the surface in question. In order to extract useful information about the spectral distribution of surface roughness or mid-spatial frequency error over a particular spatial frequency band, it is necessary to pre-process the data by first detrending the surface figure terms and then applying a window function before computing the PSD. This process eliminates discontinuities at the borders of the profile that would otherwise produce large amounts of spurious power that would mask the true nature of the surface texture. This procedure is now part of a new draft standard that is being adopted by the US OEOSC for analysis of the statistics of optical surface, OP1.005.1 Illustrations of the usefulness of these procedures will be presented.
引用
收藏
页数:10
相关论文
共 50 条
  • [21] Standardization of methods for characterizing the surface geometry of solids
    Dabrowski, A
    Robens, E
    Klobes, P
    Meyer, K
    Podkoscielny, P
    PARTICLE & PARTICLE SYSTEMS CHARACTERIZATION, 2003, 20 (05) : 311 - 322
  • [22] Rapid Measurements of Surface Tension from the Profile of Drops or Bubbles
    Goodarzi, Jim P.
    Hall, Stephen B.
    BIOPHYSICAL JOURNAL, 2013, 104 (02) : 510A - 510A
  • [23] ALGORITHMS TO DECONVOLVE STYLUS GEOMETRY FROM SURFACE PROFILE MEASUREMENTS
    DEVRIES, WR
    LI, CJ
    JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME, 1985, 107 (02): : 167 - 174
  • [24] Extracting statistics indicators from tables of basic structure
    Kudinov P.Y.
    Pattern Recognition and Image Analysis, 2011, 21 (04) : 630 - 636
  • [25] Efficient Statistics: Extracting Information from IID Observations
    Huang, Shao-Lun
    Makur, Anuran
    Kozynski, Fabian
    Zheng, Lizhong
    2014 52ND ANNUAL ALLERTON CONFERENCE ON COMMUNICATION, CONTROL, AND COMPUTING (ALLERTON), 2014, : 699 - 706
  • [26] Extracting Surface Saturation Current Density from Lifetime Measurements of Samples with Metallized Surfaces
    Dumbrell, Robert
    Juhl, Mattias K.
    Trupke, Thorsten
    Hameiri, Ziv
    2018 IEEE 7TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION (WCPEC) (A JOINT CONFERENCE OF 45TH IEEE PVSC, 28TH PVSEC & 34TH EU PVSEC), 2018, : 3243 - 3247
  • [28] Methods for extracting 'omes from microbialites
    Selene Gomez-Acata, Elizabeth
    Centeno, Carla M.
    Falcon, Luisa I.
    JOURNAL OF MICROBIOLOGICAL METHODS, 2019, 160 : 1 - 10
  • [29] METHODS FOR EXTRACTING ALKALOIDS FROM LUPINSEED
    KARARA, HA
    FETTE SEIFEN ANSTRICHMITTEL, 1981, 83 (11): : 429 - 430
  • [30] METHODS FOR EXTRACTING INSECTICIDES FROM SOIL
    TEASLEY, JI
    COX, WS
    JOURNAL OF AGRICULTURAL AND FOOD CHEMISTRY, 1966, 14 (05) : 519 - &