Unique property of a-InGaZnO/Ag Interface on Thin-Film Transistor

被引:0
|
作者
Ueoka, Yoshihiro [1 ]
Ishikawa, Yasuaki [1 ]
Bermundo, Juan Paolo [1 ]
Yamazaki, Haruka [1 ]
Urakawa, Satoshi [1 ]
Osada, Yukihiro [1 ]
Horita, Masahiro [1 ]
Uraoka, Yukiharu [1 ]
机构
[1] Nara Inst Sci & Technol, Grad Sch Mat Sci, Nara 6300192, Japan
关键词
SEMICONDUCTORS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs) having Ag, Ti, and Mo as source and drain electrodes were characterized. TFTs with Ag electrodes indicated a low and noisy on-state current at a large channel length in a low drain-source voltage. This indicates that the spatial potential barrier exists at the a-IGZO/Ag interface and the resistance of the potential barrier changes like a resistance random access memory. We investigated the unique poverties of a-IGZO/Ag interface systematically.
引用
收藏
页码:37 / 38
页数:2
相关论文
共 50 条
  • [41] Improvement in the performance of an InGaZnO thin-film transistor by controlling interface trap densities between the insulator and active layer
    Thanh Thuy Trinh
    Van Duy Nguyen
    Ryu, Kyungyul
    Jang, Kyungsoo
    Lee, Wonbeak
    Baek, Seungshin
    Raja, Jayapal
    Yi, Junsin
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2011, 26 (08)
  • [42] Roles of Hot Carriers in Dynamic Self-Heating Degradation of a-InGaZnO Thin-Film Transistors
    Liu, Fayang
    Zhou, Yuheng
    Yang, Huan
    Zhou, Xiaoliang
    Zhang, Xiaohui
    Li, Guijun
    Zhang, Meng
    Zhang, Shengdong
    Lu, Lei
    IEEE ELECTRON DEVICE LETTERS, 2022, 43 (01) : 40 - 43
  • [43] Investigation of channel width-dependent threshold voltage variation in a-InGaZnO thin-film transistors
    Liu, Kuan-Hsien
    Chang, Ting-Chang
    Wu, Ming-Siou
    Hung, Yi-Syuan
    Hung, Pei-Hua
    Hsieh, Tien-Yu
    Chou, Wu-Ching
    Chu, Ann-Kuo
    Sze, Simon M.
    Yeh, Bo-Liang
    APPLIED PHYSICS LETTERS, 2014, 104 (13)
  • [44] Intrinsic parameter extraction of a-InGaZnO thin-film transistors by a gated-four-probe method
    Jeong, Jaewook
    Kim, Joonwoo
    Lee, Gwang Jun
    Choi, Byeong-Dae
    APPLIED PHYSICS LETTERS, 2012, 100 (02)
  • [45] Plasma treatment effect on charge carrier concentrations and surface traps in a-InGaZnO thin-film transistors
    Kim, Jae-Sung
    Joo, Min-Kyu
    Piao, Ming Xing
    Ahn, Seung-Eon
    Choi, Yong-Hee
    Jang, Ho-Kyun
    Kim, Gyu-Tae
    JOURNAL OF APPLIED PHYSICS, 2014, 115 (11)
  • [46] Low-Voltage a-InGaZnO Thin-Film Transistors With Anodized Thin HfO2 Gate Dielectric
    Shao, Yang
    Xiao, Xiang
    He, Xin
    Deng, Wei
    Zhang, Shengdong
    IEEE ELECTRON DEVICE LETTERS, 2015, 36 (06) : 573 - 575
  • [47] Compact Integration of Hydrogen-Resistant a-InGaZnO and Poly-Si Thin-Film Transistors
    Wang, Yunping
    Zhou, Yuheng
    Xia, Zhihe
    Zhou, Wei
    Zhang, Meng
    Yeung, Fion Sze Yan
    Wong, Man
    Kwok, Hoi Sing
    Zhang, Shengdong
    Lu, Lei
    MICROMACHINES, 2022, 13 (06)
  • [48] A Two-Step Electrical Degradation Behavior in α-InGaZnO Thin-Film Transistor
    Pan, Tung-Ming
    Chen, Fa-Hsyang
    Chen, Ching-Hung
    Lin, Ching-Chang
    Cheng, Chieh
    Ko, Fu-Hsiang
    Lin, Wu-Hsiung
    Chen, Po-Hsueh
    Her, Jim-Long
    Matsud, Yasuhiro H.
    SEMICONDUCTORS, DIELECTRICS, AND METALS FOR NANOELECTRONICS 11, 2013, 58 (07): : 299 - 302
  • [49] Device Characterization and Design Guideline of Amorphous InGaZnO Junctionless Thin-Film Transistor
    Kim, Sang Min
    Yu, Chong Gun
    Cho, Won-Ju
    Park, Jong Tae
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (06) : 2526 - 2532
  • [50] Improved Mobility and Bias Stability of Thin Film Transistors Using the Double-Layer a-InGaZnO/a-InGaZnO:N Channel
    Yu, H.
    Zhang, L.
    Li, X. H.
    Xu, H. Y.
    Liu, Y. C.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 16 (04) : 3659 - 3663