Carbon dioxide resistive sensor based on titanium oxide nanowires doped with potassium

被引:3
|
作者
Lee, Inhee [1 ]
机构
[1] Globalfoundries, Malta, NY 12020 USA
来源
MICRO & NANO LETTERS | 2014年 / 9卷 / 04期
关键词
D O I
10.1049/mnl.2013.0718
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Potassium-doped titanium oxide (TiO2) nanowires are fabricated by the moisture-assisted, direct oxidation of a thin film of titanium at 650 degrees C. The influence of the fabrication conditions on the structure and morphology of the nanowires was investigated. It was shown that the presence of potassium (K) is necessary for the formation of the nanowires. The density of growth of the nanowires was high, and the lengths of the nanowires were tens of micrometres. The K-doped TiO2 nanowires showed the possibility of use as a sensing material because of their significant and consistent response to responding to carbon dioxide (CO2) gas. In addition, H-2 plasma treatment improved the sensitivity of the CO2 gas sensor made of K-doped TiO2 nanowires. Although the sensing mechanism is not clear, this development suggests opportunities for the fabrication of simple and inexpensive CO2 microsensors with low power consumption.
引用
收藏
页码:248 / 250
页数:3
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