Effect of thickness on the optical and electrical properties of aluminum zinc oxide nanostructured thin film deposited on polycarbonate substrate

被引:0
|
作者
Eshaghi, Akbar [1 ]
Mohammad, Hajkarimi [1 ]
机构
[1] Malek Ashtar Univ Technol, Fac Mat Sci & Engn, Shahin Shahr, Esfahan, Iran
关键词
Aluminum zinc oxide; Thin film; Optical properties; Electrical properties; DOPED ZNO; AL; GROWTH; TEMPERATURE; POLYMER;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this research, aluminum zinc oxide nanostructure thin films of various thickness (200, 250, 300 nm) were deposited on polycarbonate polymer substrates using a magnetron sputtering technique. The properties of the thin films were investigated by X-ray diffraction, Field Emission Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, UV-VISNIR spectrophotometer and four point probe method. X-ray diffraction pattern showed that the aluminum zinc oxide thin film included polycrystalline structure. The morphological results indicated that grain size increased as the thickness increased. The transmittance and sheet resistance of the aluminum zinc oxide thin films showed that aluminum zinc oxide thin films with 200 nm thickness had the highest transmission whereas aluminum zinc oxide thin film with 300 nm had the best conductivity.
引用
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页码:72 / 76
页数:5
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