A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

被引：69
|
作者：
Mochida, Y [1 ]
Tamura, M [1 ]
Ohwada, K [1 ]
机构：
[1] Murata Mfg, Yokohama Tech Ctr, Midori Ku, Yokohama, Kanagawa 2260006, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 80卷 / 02期
关键词：
gyroscope; micromachining; mechanical coupling; laser displacement meter;
D O I：
10.1016/S0924-4247(99)00263-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We investigated the mechanical coupling between the drive and detection modes of micromachined vibrating rate gyroscopes, and designed and fabricated a gyroscope with a new structure to reduce the coupling. The coupling of the oscillator was measured using a new measurement system with a two-dimensional laser displacement meter. The oscillations were found to have an elliptical motion due to the coupling. When the frequency mismatch was reduced by means of electrostatic frequency tuning with a DC bias voltage, the coupling increased. The new structure, which has independent beams for the drive and detection modes, exhibited weaker coupling; and the resolution was 0.07 degrees/s at a band width of 10 Hz. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：170 / 178
页数：9
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