Highly sensitive trace moisture ball surface acoustic wave sensor using SiOx film

被引：18

作者：

Hagihara, Satoshi ^{[1
]}

Tsuji, Toshihiro ^{[1
]}

Oizumi, Toru ^{[1
]}

Takeda, Nobuo ^{[1
]}

Akao, Shingo ^{[1
,2
]}

Ohgi, Tsuneo ^{[2
]}

Takayanagi, Kosuke ^{[2
]}

Yanagisawa, Takayuki ^{[2
]}

Nakaso, Noritaka ^{[2
]}

Tsukahara, Yusuke ^{[2
]}

Yamanaka, Kazushi ^{[1
]}

机构：

[1] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi 9808579, Japan

[2] Toppan Printing Co Ltd, Sugito, Saitama 3458508, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 07期

关键词：

TEMPERATURE COMPENSATION; PROPAGATION; SPHERE;

D O I：

10.7567/JJAP.53.07KD08

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Regarding the gases for the manufacturing process of semiconductor devices, fast and sensitive sensors are needed to control trace moisture to less than 1 mu mol/mol. A ball surface acoustic wave (SAW) sensor is promising technology for this purpose. In this study, we verify the response of a sol-gel SiOx film-coated ball SAW sensor to extremely low-concentration moisture using a cavity ring down spectroscopy (CRDS), the most sensitive commercially available moisture sensor, as a reference sensor. We clearly measured 17 nmol/mol moisture by developing a sensor cell using metal O-rings reducing the leakage of moisture. The response time from 390 to 790 nmol/mol was one tenth of that for the CRDS, and the detection limit was estimated to be as low as 0.2 nmol/mol. (C) 2014 The Japan Society of Applied Physics

引用

页数：5

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