A simulation-based analysis of the cycle time of cluster tools in semiconductor manufacturing

Cluster tools are widely used in modem semiconductor manufacturing facilities. In parallel mode they offer high throughput at the cost of a complex behaviour with regard to lot cycle times. The reason is that cluster tools are behave like small factories themselves. We analyze the slow-down of the processing of a lot that is caused by other lots in the tool and examine how the slow-down factor can be used for scheduling and for predicting lot cycle times. This cycle time analysis is mandatory for production planning and can only be done by simulation so far.